Iodotrifluoromethane/CF3I
Iodotrifluoromethane (CF3I) is an environmentally friendly dry etching gas with low GWP，mainly used in front end etching process of flash memory chips manufacturing.
Product Description
|
Items |
Specification |
|
Chemical name |
Iodotrifluoromethane, Trifluoroiodomethane |
|
Chemical formula |
CF3-I |
|
Molecular formula |
CF3I |
|
CAS No. |
2314-97-8 |
|
Molecular weight (g/mol) |
195.91 |
|
ODP |
≈0 |
|
GWP100 yr |
＜0.4 |
|
Atmospheric lifetime (days) |
＜2 |
Physical & Chemical Properties
|
Attributes |
Values |
|
Chemical Name |
Iodotrifluoromethane, Trifluoroiodomethane |
|
Boiling point (℃) |
-22.5 |
|
Melting point (℃) |
-110 |
|
Specific gravity (g/ml, @25℃) |
2.096 |
|
Vapor pressure (MPa, @20℃) |
0.427 |
|
Critical pressure (MPa) |
4.04 |
|
Critical temperature (℃) |
122 |
|
Explosion limits (%vol) |
Nonflammable |
Packaging Information: 4.64L/10.2L/44L Cylinder