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1,1,1,2,3,3-Hexafluoropropane/HFC-236ea

1,1,1,2,3,3-Hexafluoropropane(HFC-236ea) is an environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.

Product Description

Items

Specification

Chemical name

1,1,1,2,3,3-Hexafluoropropane; HFC-236ea

CAS No.

431-63-0

Molecular formula

C3H2F6

Molecular weight

152.04

Boiling point (101.325kPa, ℃)

6.19

Critical Temperature (℃)

139.29

Critical Pressure (MPa)

3.50198

Packing Specification: 4.64L/10.2L/44L Cylinder