1,1,1,2,3,3-Hexafluoropropane/HFC-236ea
1,1,1,2,3,3-Hexafluoropropane(HFC-236ea) is an environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.
Product Description
Items |
Specification |
|
Chemical name |
1,1,1,2,3,3-Hexafluoropropane; HFC-236ea |
|
CAS No. |
431-63-0 |
|
Molecular formula |
C3H2F6 |
|
Molecular weight |
152.04 |
|
Boiling point (101.325kPa, ℃) |
6.19 |
|
Critical Temperature (℃) |
139.29 |
|
Critical Pressure (MPa) |
3.50198 |
Packing Specification: 4.64L/10.2L/44L Cylinder