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Hexafluoroisobutylene/HFIB

Hexafluoroisobutylene(HFIB) is an environmentally friendly dry etching gas with low GWP, mainly used in front end etching process of semiconductor.

Product Description

Items

Specification

Chemical name

Hexafluoroisobutylene; 2-Trifluoromethyl-3,3,3-trifluoropropene; HFIB

CAS No.

382-10-5

Molecular formula

C4H2F6

Molecular weight

164.05

Boiling point (101.325kPa, ℃)

14.5

Solubility (23℃, g/L)

0.23

Density (101.325kPa, g/cm3)

1.39

Packing Specification: 4.64L/10.2L/44L Cylinder