
Hexafluoroisobutylene/HFIB
Hexafluoroisobutylene(HFIB) is an environmentally friendly dry etching gas with low GWP, mainly used in front end etching process of semiconductor.
Product Description
Items |
Specification |
|
Chemical name |
Hexafluoroisobutylene; 2-Trifluoromethyl-3,3,3-trifluoropropene; HFIB |
|
CAS No. |
382-10-5 |
|
Molecular formula |
C4H2F6 |
|
Molecular weight |
164.05 |
|
Boiling point (101.325kPa, ℃) |
14.5 |
|
Solubility (23℃, g/L) |
0.23 |
|
Density (101.325kPa, g/cm3) |
1.39 |
Packing Specification: 4.64L/10.2L/44L Cylinder