trans-1,1,1,4,4,4-Hexafluoro-2-butene/HFO-1336mzz(E)
HFO-1336mzz(E) is a non-ozone depletion, non-flammable, low global warming potential (GWP) environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.
Product Description
|
Items |
Specification |
|
Chemical name |
Trans-1,1,1,4,4,4-Hexafluoro-2-butene, HFO-1336mzz(E) |
|
CAS No. |
66711-86-2 |
|
ODP |
0 |
|
GWP100 years |
18 |
Physical & Chemical properties
|
Attributes |
Values |
|
Chemical formula |
Trans CF3-CH=CH-CF3 |
|
Molecular weight（g/mol） |
164.05 |
|
Boiling point（℃） |
7.5 |
|
Specific gravity / density（g/ml） |
1.356 |
|
Critical Temperature(℃) |
137.7 |
|
Critical Pressure(MPa) |
3.15 |
Packaging Information: 4.64L/10.2L/44L Cylinder