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1,1,1,3,3,3-Hexafluoropropane/HFC-236fa

1,1,1,3,3,3-Hexafluoropropane(HFC-236fa) is an environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.

Product Description

Items

Specification

Chemical name

1,1,1,3,3,3-Hexafluoropropane; HFC-236fa

CAS No.

690-39-1

Molecular formula

C3H2F6

Molecular weight

152.04

Boiling point (101.325kPa, ℃)

-1.1

Vapor Pressure (25℃, kPa)

260.8

Density (101.325kPa, g/cm3)

1.371

Packing Specification: 4.64L/10.2L/44L Cylinder