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Hexafluoropropene/PFC-1216

Hexafluoropropene(PFC-1216) is an environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.

Product Description

Items

Specification

Chemical name

Hexafluoropropene; Perfluoropropene; HFP; PFC-1216

CAS No.

116-15-4

Molecular formula

C3F6

Molecular weight

150.02

Boiling point (101.325kPa, ℃)

-29

Vapor Pressure (27℃, kPa)

788.16

Density (-40℃, g/cm3)

1.58

Packing Specification: 4.64L/10.2L/44L Cylinder