Hexafluoropropene/PFC-1216
Hexafluoropropene(PFC-1216) is an environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.
Product Description
Items |
Specification |
|
Chemical name |
Hexafluoropropene; Perfluoropropene; HFP; PFC-1216 |
|
CAS No. |
116-15-4 |
|
Molecular formula |
C3F6 |
|
Molecular weight |
150.02 |
|
Boiling point (101.325kPa, ℃) |
-29 |
|
Vapor Pressure (27℃, kPa) |
788.16 |
|
Density (-40℃, g/cm3) |
1.58 |
Packing Specification: 4.64L/10.2L/44L Cylinder